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Fabrication and Characterization of Polypyrrole/Gold Bilayer Microactuators for Bio-Mems Applications

机译:用于生物膜应用的聚吡咯/金双层微致动器的制备和表征

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摘要

The proof of concept for conjugated polymer bilayer microactuators had been demonstrated prior to this dissertation with numerous devices, and their advantages in biomedical applications had been recognized. The next step for this technology was implementation in real systems, which required knowledge of the main performance metrics and limitations. In this dissertation, work focused on measuring these metrics for the first time to facilitate the development of cell-clinics, which are microsystems for cell study and for cell-based sensing. The conjugated polymer used throughout the dissertation was polypyrrole doped with dodecylbenzenesulfonate, PPy(DBS), and the second layer in the bilayer was gold.Device fabrication challenges were first identified and addressed, focusing particularly on methods to produce PPy/Au bilayers that did not suffer from delamination. By electroplating Au onto the electrodes or by wet etching them to increase mechanical interlocking, this problem, which had plagued the field for the last decade, was solved. Another important contributor to lifetime, which is a key actuator metric, is loss of electro-activity with extended cycling. This metric was quantified through measurements of the total exchanged charge of PPy(DBS) with cycles of electromechanical redox. This result impacts how these actuators can be used. Two other key metrics on which this work focused were bending angle, analogous to stroke in a linear actuator, and force. It was necessary to determine bending angle as a function of film thickness experimentally because the traditional bilayer beam models could not account for microfabricated bilayer radius of curvature data. Through experimental testing over a wide range of PPy and Au thicknesses, the relationship between PPy:Au thickness ratio and curvature was mapped out. The experimental results demonstrated the existence of strain gradients within the conjugated polymer films, with the material at the surface having greater actuation strain than that at the gold interface. Finally, accurate force measurements had not been done prior to this dissertation research because of the significant challenges involved in developing a method for measuring force in microactuators. This dissertation described the development of such a methodology and provides data for the blocked force as a function of polypyrrole thickness.
机译:在此之前,共轭聚合物双层微致动器的概念证明已经通过多种装置得到了证明,并且它们在生物医学应用中的优势也得到了认可。这项技术的下一步是在实际系统中实施,这需要了解主要性能指标和限制。在本文中,工作重点是首次测量这些指标,以促进细胞诊所的发展,这是用于细胞研究和基于细胞的传感的微系统。整个论文中使用的共轭聚合物是掺杂有十二烷基苯磺酸盐的聚吡咯,PPy(DBS),双层中的第二层是金。首先确定并解决了器件制造方面的挑战,特别是着重于生产不存在PPy / Au双层的方法遭受分层。通过将Au电镀到电极上或通过湿蚀刻它们以增加机械互锁,解决了困扰该领域近十年的问题。寿命的另一个重要因素,是关键的执行器指标,是随着循环时间的延长,电活性的损失。通过使用机电氧化还原循环测量PPy(DBS)的总交换电荷来量化该指标。该结果影响了这些执行器的使用方式。这项工作关注的其他两个关键指标是弯曲角度(类似于线性致动器的行程)和作用力。有必要通过实验确定弯曲角度与薄膜厚度的关系,因为传统的双层梁模型无法解释微细加工的双层曲率半径数据。通过在广泛的PPy和Au厚度范围内进行实验测试,得出了PPy:Au厚度比与曲率之间的关系。实验结果表明,在共轭聚合物薄膜中存在应变梯度,表面材料的致动应变大于金界面的致动应变。最后,由于开发微致动器中的力测量方法涉及重大挑战,因此在本论文研究之前尚未进行精确的力测量。本文描述了这种方法的发展,并提供了与聚吡咯厚度有关的受阻力数据。

著录项

  • 作者

    Liu Yingkai;

  • 作者单位
  • 年度 2005
  • 总页数
  • 原文格式 PDF
  • 正文语种 en_US
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