Precision transfer printing of ultra-thin AlInGaN micron-size light-emitting diodes

摘要

We report the fabrication of a mechanically-flexible 16times16 array of thin-film, micron-size LEDs emitting at 480 nm. Devices were transfer-printed onto a mechanically-flexible ITO backplane using a modified, high-precision (placement accuracy +or-25 nm) assembly system.