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Mg(2)Si(x)Sn(1-x)heterostructures on Si(111) substrate for optoelectronics and thermoelectronics

机译:用于光电子和热电子学的Si(111)衬底上的Mg(2)Si(x)Sn(1-x)异质结构

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摘要

Thin (50-90 m) non-doped and doped (by Al atoms) Mg2Sn0.6Si0.4 and Mg(2)Sn(0.4)Si(0.6)films with roughness of 1.9-3.7 nm have been grown by multiple deposition and single annealing at 150 degrees C of multilayers formed by repetition deposition of three-layers (Si-Sn-Mg) on Si(111) p-type wafers with 45 cm resistivity. Transmission electron microscopy has shown that the first forming layer is an epitaxial layer of hex-Mg2Sn(300) on Si(111) substrate with thickness not more than 5-7 nm. Epitaxial relationships: hex-Mg2Sn(300)parallel to Si(111), hex-Mg2Sn[001]parallel to Si[-112] and hex-Mg2Sn[030]parallel to Si[110] have been found for the epitaxial layer. But inclusions of cub-Mg2Si were also observed inside hex-Mg2Sn layer. It was found that the remaining part of the film thickness is in amorphous state and has a layered distribution of major elements: Mg, Sn and Mg without exact chemical composition. It was established by optical spectroscopy data that both type films are semiconductor with undispersed region lower 0.18 eV with n(o) = 3.59 +/- 0.01, but only two direct interband transitions with energies 0.75-0.76 eV and 1.2 eV have been determined. The last interband transition has been confirmed by photoreflectance data at room temperature. Fourier transmittance spectroscopy and Raman spectroscopy data have established the formation of stannide, silicide and ternary compositions.
机译:通过多次沉积和生长方法,已生长出厚度为(50-90 m)非掺杂和掺杂(Al原子)的Mg2Sn0.6Si0.4和Mg(2)Sn(0.4)Si(0.6)薄膜,其粗糙度为1.9-3.7 nm。通过在具有45 cm电阻率的Si(111)p型晶片上重复沉积三层(Si-Sn-Mg)形成的多层在150摄氏度下进行一次退火。透射电子显微镜显示,第一形成层是Si(111)衬底上的六方Mg 2 Sn(300)的外延层,其厚度不超过5-7nm。外延关系:已发现外延层平行于Si(111)的hex-Mg2Sn(300),平行于Si [-112]的hex-Mg2Sn [001]和平行于Si [110]的hex-Mg2Sn [030]。但是,在六角-Mg2Sn层内部也观察到了立方-Mg2Si夹杂物。发现膜厚度的其余部分处于非晶态并且具有主要元素的层状分布:Mg,Sn和Mg,没有确切的化学组成。通过光谱数据确定,两种类型的膜都是具有0.18eV的未分散区域的半导体,n(o)= 3.59 +/- 0.01,但是仅确定了能量为0.75-0.76eV和1.2eV的两个直接的带间跃迁。室温下的光反射数据已确认了最后的带间跃迁。傅里叶透射光谱和拉曼光谱数据已经确定了锡化物,硅化物和三元化合物的形成。

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