Graphene-coated rayleigh SAW resonators for NO2 detection

摘要

This paper describes the development of a novel low-cost Rayleigh Surface Acoustic Wave Resonator (SAWR) device coated with a graphene layer that is capable of detecting PPM levels of NO2 in air. The sensor comprises two 262 MHz ST-cut quartz based Rayleigh SAWRs arranged in a dual oscillator configuration; where one resonator is coated with gas-sensitive graphene, and the other left uncoated to act as a reference. An array of NMP-dispersed exfoliated reduced graphene oxide dots was deposited in the active area inside the SAWR IDTs by a non-contacting, micro ink-jet printing system. An automated Mass Flow Controller system has been developed that delivers gases to the SAWR sensors with circuitry for excitation, amplification, buffering and signal read-out. This SAW-based graphene sensor has sensitivity to NO2 of ca. 25 Hz/ppm and could be implemented in a low-power low-cost gas sensor.