Recent advances in micro- and nano-electromechanical systems (MEMS/NEMS) technology have led to a niche industry of diverse small-scale devices that include microsensors, micromachines and drug-delivery systems. For these devices, there is an urgent need to develop Micro Lithium Ion Batteries (MLIBs) with dimensions on the scale 1–10 mm3 enabling on-board power delivery.\ud\udUnfortunately, power limitations are inherent in planar 2D cells and only the advent of 3D designs and microarchitectures will lead to a real breakthrough in the microbattery technology. During the last few years, many efforts to optimise MLIBs were discussed in literature, both in the planar and 3D configurations.\udThis review highlights the importance of 3D microarchitectured electrodes to fabricate batteries that can be device-integrated with exceptionally high specific power density coupled with exquisite miniaturisation. A wide literature overview is provided and recent advances in manufacturing routes to 3D-MLIBs comprising materials synthesis, device formulation, device testing are herein discussed. The advent of simple, economic and easily scalable fabrication processes such as 3D printing will have a decisive role in the growing field of micropower sources and microdevices.
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机译：微和纳米机电系统（MEMS / NEMS）技术的最新进展已导致各种小型设备的利基产业，这些设备包括微传感器，微机械和药物输送系统。对于这些设备，迫切需要开发尺寸为1–10 mm3的微型锂离子电池（MLIB），以实现车载供电。\ ud \ ud不幸的是，平面2D电池固有的功率限制是唯一的， 3D设计和微体系结构的出现将导致微电池技术的真正突破。在过去的几年中，文献中讨论了优化MLIB的许多努力，包括平面和3D配置。\ ud这篇评论强调了3D微体系结构电极在制造可与器件集成且具有极高比功率密度的电池中的重要性。精致的小型化。提供了广泛的文献综述，并且本文讨论了包括材料合成，器件配方，器件测试的3D-MLIB制造路线的最新进展。简单，经济和易于扩展的制造工艺（如3D打印）的出现将在微功率源和微设备领域的发展中起决定性作用。
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