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The effect of increasing V content on the structure, mechanical properties and oxidation resistance of Ti–Si–V–N films deposited by DC reactive magnetron sputtering

机译:V含量的增加对直流反应磁控溅射沉积Ti–Si–V–N薄膜的结构,力学性能和抗氧化性的影响

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摘要

In the last years, vanadium rich films have been introduced as possible candidates for self-lubrication at high temperatures, based on the formation of V2O5 oxide. The aim of this investigation was to study the effect of V additions on the structure, mechanical properties and oxidation resistance of Ti–Si–V–N coatings deposited by DC reactive magnetron sputtering. The results achieved for TiSiVN films were compared and discussed in relation to TiN and TiSiN films prepared as reference. All coatings presented a fcc NaCl-type structure. A shift of the diffraction peaks to higher angles with increasing Si and V contents suggested the formation of a substitutional solid solution in TiN phase. Hardness and Young's modulus of the coatings were similar regardless on V content. The onset of oxidation of the films decreased significantly to 500 °C when V was added into the films; this behaviour was independent of the Si and V contents. The thermogravimetric isothermal curves of TiSiVN coatings oxidized at temperatures below the melting point of α-V2O5 (∼685 °C) showed two stages: at an early stage, the weight increase over time is linear, whilst, in the second stage, a parabolic evolution can be fitted to the experimental data. At higher temperatures only a parabolic evolution was fitted. α-V2O5 was the main phase detected at the oxidized surface of the coatings. Reduction of α-V2O5 to β-V2O5 phase occurred for temperatures above its melting point.
机译:近年来,由于形成了V2O5氧化物,已经引入了富钒薄膜作为高温自润滑的可能候选材料。这项研究的目的是研究添加钒对直流反应磁控溅射沉积Ti-Si-V-N涂层的结构,力学性能和抗氧化性的影响。比较并讨论了TiSiVN薄膜所获得的结果,并讨论了TiN和TiSiN薄膜作为参考。所有涂层均呈现出fcc NaCl型结构。随着Si和V含量的增加,衍射峰向更高的角度移动表明在TiN相中形成了固溶替代溶液。不管V含量如何,涂层的硬度和杨氏模量都相似。当向膜中添加V时,膜的氧化开始显着降低至500°C。这种行为与Si和V的含量无关。在低于α-V2O5熔点(〜685°C)的温度下氧化的TiSiVN涂层的热重等温曲线显示了两个阶段:在早期阶段,重量随时间增加是线性的,而在第二阶段,抛物线呈抛物线形进化可以适合实验数据。在较高的温度下,仅拟合了抛物线形的演变。 α-V2O5是在涂层的氧化表面检测到的主要相。在高于其熔点的温度下,α-V2O5还原为β-V2O5。

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