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Influence of Al content on the mechanical properties and thermal stability in protective and oxidation atmospheres of Zr–Cr–Al–N coatings

机译:铝含量对Zr–Cr–Al–N涂层的保护性气氛和氧化气氛中的机械性能和热稳定性的影响

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摘要

Tools have been used under very high temperature in recent decades. Therefore, coatings on tools are required to be thermally stable and excellent in oxidation-resistance. The introduction of Al into nitride coatings was considered as an effective way to improve the coating oxidation-resistance and thermal stability. Quaternary Zr–Cr–Al–N coatings were deposited with increasing Al contents by d.c. reactive magnetron sputtering. The coatings were annealed at 800 and 900 °C for 1 h in Ar + H2 atmosphere and exposed at 700 °C for 2 h and 1200 °C for 1 h in air, respectively. The hardness, Young's modulus, adhesive/cohesive strength and residual stress of as-deposited and annealed coatings were characterized by nanoindentation, scratch test and curvature measurement method. The results showed that the coating hardness and Young's modulus increased after post-annealing at 800 °C or 900 °C; the adhesive/cohesive strength decreased after annealing due to the substrate softening. The residual stress decreased after annealing and the lowest stress status depended on the crystallinity degree of the coating. XRD patterns showed mainly Cr2O3 formed in the Al-free, and a mixture of oxides of ZrO2 and Al2O3 in the high Al coatings after 1200 °C/1 h oxidation. N is still detected in the coatings, which indicates that the coatings are not fully oxidized being exposed to 700 °C for 2 h.
机译:近几十年来,工具已在非常高的温度下使用。因此,要求工具上的涂层是热稳定的并且具有优异的抗氧化性。将铝引入氮化物涂层被认为是提高涂层抗氧化性和热稳定性的有效方法。在d.c时,随着Z含量的增加,Zr-Cr-Al-N四元涂层的沉积逐渐增加。反应磁控溅射。将涂层在Ar + H2气氛中分别在800和900°C退火1 h,并在空气中分别在700°C暴露2 h和1200°C暴露1 h。通过纳米压痕,划痕试验和曲率测量方法对沉积和退火后的涂层的硬度,杨氏模量,粘合/内聚强度和残余应力进行了表征。结果表明,在800°C或900°C后退火后,涂层硬度和杨氏模量增加;退火后,由于基材软化,粘合/内聚强度降低。退火后残余应力降低,最低应力状态取决于涂层的结晶度。 XRD图谱显示主要是在无铝中形成了Cr2O3,并且在1200°C / 1 h氧化后,高Al涂层中ZrO2和Al2O3的氧化物混合物。在涂层中仍检测到N,这表明涂层在700°C下暴露2小时仍未完全氧化。

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