The increased demand for modern optical components necessitates an interferometric system that can rapidly and accurately measure wavefront phase errors during the complete fabrication process, from generation to polishing. The suitability of infrared wavelengths for several optical testing applications is well known, as are the greatly increased speed and accuracy of phase-shifting interferometric techniques. Therefore, this dissertation discusses extensively three topics: (1) the demonstration theoretically and experimentally of the feasibility of using a pyroelectric vidicon for infrared phase-shifting interferometry, (2) the design and fabrication of a prototype next-generation optical shop infrared phase-shifting interferometric system, and (3) the definition and quantification of the fundamental system performance parameters and limitations. Additionally, some application examples of infrared phase-shifting interferometry are presented, and specific recommendations for future work are included with the conclusions.
展开▼
