Characterization of an integrally wound tungsten and aluminum filament for physical vapor deposition

摘要

As part of the effort to increase the reliability of the MMT Observatory (MMTO) 6.5m Primary Mirror Coating System, the specified filament has changed from a configuration in which the aluminum charge is hand wound around a tungsten filament to a configuration in which the aluminum is integrally wound with the tungsten at the time of filament manufacture. In the MMTO configuration, this filament consists of the three strands of tungsten wire and one strand of aluminum wire. In preparation of a full system test utilizing two hundred filaments fired simultaneously, an extensive testing program was undertaken to characterize these filaments using a four filament configuration in the MMTO small coating chamber (0.5m) and then a forty filament configuration in the University of Arizona Steward Observatory coating chamber (2m). The testing using the smaller coating chambers has shown these filaments provide very predicable coatings from test to test, and with the proper heating profile, these filaments greatly reduce the likelihood of aluminum drips. The initial filament design was modified during the course of testing by shortening the unwound filament length to closer match the aluminum load required in the MMTO coating chamber. This change increased the aluminum deposition rates without increasing the power delivered of the filament power supplies (commercial welders). Filament power levels measured at the vacuum chamber feedthroughs, currents, and deposition rates from multiple coating tests, including a full system test, are presented.