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Tunable High-Power High-Brightness Vertical-External-Cavity Surface-Emitting Lasers and Their Applications

机译:可调谐大功率高亮度垂直外腔面发射激光器及其应用

摘要

The extraction of high power with high beam quality from semiconductor lasers has long been a goal of semiconductor laser research. Optically pumped vertical-external-cavity surface-emitting lasers (VECSELs) have already shown the potential for their high power high brightness operation. In addition, the macroscopic nature of the external cavity in these lasers makes intracavity nonlinear frequency conversion quite convenient. High-power high-brightness VECSELs with wavelength flexibility enlarge their applica-tions. The drawbacks of the VECSELs are their poor spectral characteristics, thermal-induced wavelength shift and a few-nm-wide linewidth.The objective of this dissertation is to investigate tunable high-power high-brightness VECSELs with spectral and polarization control. The low gain and microcavity reson-ance of the VECSEL are the major challenges for developing tunable high-power VECSELs with large tunability. To overcome these challenges, the V-shaped cavity, where the anti-reflection coated VECSEL chip serves as a folding mirror, and an extremely low-loss (at tuned wavelength) intracavity birefringent filter at Brewster's angle are employed to achieved the high gain, low-loss wavelength selectivity and the elimination of microcavity. This cavity results in multi-watt TEM00 VECSELs with a wavelength tuning range of 20~30 nm about 975 nm. Also the longitudinal mode discrimination introduced by birefringent filter makes the linewidth narrow down to 0.5 nm. After the tunable linearly polarized fundamental beam is achieved, the tunable blue-green VECSELs are demonstrated by using type I intracavity second-harmonic generation. The spectral control of VECSELs makes it possible to apply them as an efficient pump source for Er/Yb codoped single-mode fiber laser and to realize the spectral beam combining for multi-wavelength high- brightness power scaling.In this dissertation, theory, design, fabrication and characterization are presented. Rigorous microscopic many-body theory of the quantum well gain, based on semiconductor Bloch equations and k.p theory, is introduced. The closed loop design tool based on this theory is not only used to design the VECSEL structure, but also used as a precise on-wafer diagnostics tool by the experiment/theory comparison of the photo-luminescence. The characterization of the wafer shows that the modeling is in good agreement with the measured results.The VECSEL high power high brightness performance relies on the fabrication of the chip. The fabrication method of the VECSEL chip, which provides the optically smooth surface and good heat dissipation, is presented. The anti-reflection coating on the chip surface can significantly improve the slope efficiency of VECSEL when high reflectivity output coupler is used. Over 12-W VECSEL cw output power with 43 % slope efficiency is demonstrated at 0 oC. A beam quality factor (M^2 factor) of 1.75 is obtained at 11 W output power.
机译:从半导体激光器中提取具有高光束质量的高功率一直是半导体激光器研究的目标。光泵浦垂直外腔表面发射激光器(VECSEL)已经显示出其高功率高亮度工作的潜力。另外,这些激光器中外腔的宏观性质使得腔内非线性频率转换非常方便。具有波长灵活性的高功率高亮度VECSEL扩大了其应用范围。 VECSEL的缺点是光谱特性差,热引起的波长偏移和线宽只有几纳米。本文的目的是研究具有光谱和偏振控制的可调谐高功率高亮度VECSEL。 VECSEL的低增益和微腔谐振是开发具有大可调性的可调谐大功率VECSEL的主要挑战。为了克服这些挑战,采用了V形腔,在该腔中采用了抗反射涂层的VECSEL芯片作为折叠镜,并采用了布鲁斯特角的极低损耗(在可调波长下)的腔内双折射滤波器来实现高增益,低损耗波长选择性和消除微腔。该腔导致了多瓦TEM00 VECSEL,其波长调谐范围为20〜30 nm约975 nm。同样,由双折射滤光片引入的纵向模式辨别使线宽缩小到0.5 nm。获得可调线性偏振基本光束后,通过使用I型腔内二次谐波发生器演示了可调的蓝绿色VECSEL。 VECSEL的光谱控制使其有可能被用作Er / Yb共掺杂单模光纤激光器的有效泵浦源,并实现多光束高亮度功率定标的光谱束组合。 ,制造和表征。介绍了基于半导体Bloch方程和k.p理论的严格的量子阱增益微观多体理论。基于该理论的闭环设计工具不仅用于设计VECSEL结构,而且通过光致发光的实验/理论比较,还可以用作精确的晶圆上诊断工具。晶圆的特性表明建模与实测结果吻合良好。VECSEL高功率高亮度性能取决于芯片的制造。提出了一种VECSEL芯片的制造方法,该方法提供了光学上光滑的表面和良好的散热性能。当使用高反射率输出耦合器时,芯片表面的抗反射涂层可以显着提高VECSEL的斜率效率。在0 oC时,证明了超过12W的VECSEL cw输出功率具有43%的斜率效率。在11 W输出功率下可获得1.75的光束质量因数(M ^ 2因数)。

著录项

  • 作者

    Fan Li;

  • 作者单位
  • 年度 2006
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  • 原文格式 PDF
  • 正文语种 EN
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