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Structure and properties of laser-fired, sol-gel derived tungsten oxide films.

机译:激光烧制的溶胶凝胶衍生的氧化钨薄膜的结构和性能。

摘要

This investigation focuses on the use of laser radiation to fire sol-gel derived oxide films. The main emphasis of this work was to make high quality tungsten oxide films with good electrochromic properties. Laser firing was done with a carbon dioxide laser operated in continuous mode. The laser-fired tungsten oxide films were measured for density, composition, crystallinity and electrochromic behavior. Analytical tools included multi-angle ellipsometry, FTIR, TEM, XRD, spectrophotometry and electrochemistry. The effect of process variables (laser power, spot size and translation speed) on the extent of film densification and microstructural evolution was investigated. Thermal modeling of laser-heated sol-gel films was studied to further understand the laser firing process and to estimate firing temperatures. Temperature calculations were based on laser parameters, sample geometry and target materials. Properties characteristic of firing temperature were used to verify the thermal modeling. For laser-fired films, the properties at the calculated temperatures agreed well with the properties of similar furnace-fired films. The modeling also provided the thermal profiles seen by the laser heated materials. Laser firing was shown to be a feasible technique to make good quality electrochromic films. By precisely controlling the irradiation, the microstructure of tungsten oxide films was tailored to produce the desired electrochromic properties. Transmission electron microscopy showed film microstructures that varied from completely amorphous to fully crystalline. Corresponding optoelectrochemical measurements indicated a decrease in electrochromism with increasing crystallinity. The effects of density/porosity and coating composition are also discussed. It is proposed that laser firing of sol-gel derived films can be used for optics, sensors, graded index materials, and electrochromic windows. The ability to heat localized regions afforded by laser firing is advantageous for writing lines and patterns in these films. Windows with graded electrochromic properties can be made by dynamically changing the laser firing conditions as the beam rasters through a workpiece. Similarly, electrochromic signs can be written into a window--after the pattern is written by laser densification, the remaining film is etched away, leaving the pattern.
机译:这项研究的重点是使用激光辐射来烧制溶胶-凝胶衍生的氧化膜。这项工作的主要重点是制造具有良好电致变色性能的高质量氧化钨膜。用以连续模式操作的二氧化碳激光器进行激光烧成。测量了激光烧制的氧化钨膜的密度,组成,结晶度和电致变色行为。分析工具包括多角度椭圆仪,FTIR,TEM,XRD,分光光度法和电化学。研究了工艺变量(激光功率,光斑尺寸和平移速度)对薄膜致密化程度和微观结构演变的影响。研究了激光加热的溶胶-凝胶薄膜的热模型,以进一步了解激光烧制过程并估计烧制温度。温度计算基于激光参数,样品几何形状和目标材料。烧成温度的特性被用来验证热模型。对于激光烧制的薄膜,在计算温度下的性能与类似的熔炉烧制的薄膜的性能非常吻合。该建模还提供了由激光加热的材料看到的热曲线。激光烧制被证明是制造高质量电致变色膜的可行技术。通过精确控制辐照,调整氧化钨膜的微观结构以产生所需的电致变色性能。透射电子显微镜显示膜的微观结构从完全无定形到完全结晶。相应的光电化学测量表明,电致变色随着结晶度的增加而降低。还讨论了密度/孔隙率和涂层组成的影响。有人提出,溶胶-凝胶衍生薄膜的激光烧成可用于光学器件,传感器,渐变折射率材料和电致变色窗。加热由激光烧结提供的局部区域的能力对于在这些膜中写入线和图案是有利的。当光束光栅穿过工件时,可以通过动态改变激光发射条件来制作具有渐变电致变色特性的窗户。类似地,可以将电致变色标志写入窗口中-在通过激光致密化写入图案后,将剩余的薄膜蚀刻掉,留下图案。

著录项

  • 作者

    Taylor Douglas John.;

  • 作者单位
  • 年度 1995
  • 总页数
  • 原文格式 PDF
  • 正文语种 en
  • 中图分类

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