Oxidation and removal of organic impurities from ultrapure water

摘要

This study focuses on three aspects of the removal of organic impurities from ultrapure water. The interactions between system components such as ion exchange, UV unit and filter on overall purification are examined. The results indicate that the sequencing of the UV unit and the filter affects the TOC removal efficiency so that greater TOC removal is achieved when filtration precedes UV treatment. Furthermore, a UV unit followed by an ion exchange tank is an effective configuration for the removal of some impurities, but is undesirable for others particularly the charged macromolecules and particles. To further enhance the removal of TOC from the water, the effect of combining dissolved ozone with UV light is examined. A synergistic removal, significantly greater than the additive effect of ozone and UV treatments, is achieved. To predict the removal of organic impurities from ultrapure water, a system model is developed using reaction kinetics and reactor design concepts. (Abstract shortened with permission of author.)