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Thermal analysis of amorphous oxide thin-film transistor degraded by combination of joule heating and hot carrier effect

机译:焦耳热和热载流子效应相结合降解的非晶氧化物薄膜晶体管的热分析

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摘要

Stability is the most crucial issue in the fabrication of oxide thin-film transistors (TFTs) for next-generation displays. We have investigated the thermal distribution of an InSnZnO TFT under various gate and drain voltages by using an infrared imaging system. An asymmetrical thermal distribution was observed at a local drain region in a TFT depending on bias stress. These phenomena were decelerated or accelerated with stress time. We discussed the degradation mechanism by analyzing the electrical properties and thermal distribution. We concluded that the degradation phenomena are caused by a combination of Joule heating and the hot carrier effect.
机译:在下一代显示器的氧化物薄膜晶体管(TFT)的制造中,稳定性是最关键的问题。我们已经通过使用红外成像系统研究了在各种栅极和漏极电压下InSnZnO TFT的热分布。根据偏应力,在TFT的局部漏极区域观察到不对称的热分布。这些现象随着压力时间而减慢或加速。通过分析电性能和热分布,我们讨论了降解机理。我们得出的结论是,退化现象是由焦耳热和热载流子效应共同引起的。

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