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Influences of Heat-Treatment Temperature and Reduction of Oxide Thickness on Electrical Properties of Ta-Zr Anodized Thin Film Capacior

机译：热处理温度和氧化物厚度的减小对Ta-Zr阳极氧化薄膜电容器电性能的影响

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渡邊大介; 後藤智利; 山根美佐雄; 佐々木克孝; 阿部良夫; Watanabe Daisuke; Goto Tomoyoshi; Yamane Misao; Sasaki Katsutaka; Abe Yoshio;
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年度 2002
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原文格式 PDF
正文语种 ja
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入库时间 2022-08-31 15:18:57

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Influences of Heat-Treatment Temperature and Reduction of Oxide Thickness on Electrical Properties of Ta-Zr Anodized Thin Film Capacior

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