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A Study on the thin Film Capacitor with High Heat-Proof Property and High Reliability by Using Anodized Film of Al3Hf Intermetallic Compound

机译：Al3Hf金属间化合物阳极氧化膜对高耐热性和高可靠性薄膜电容器的研究

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尾関雅彦; 山根美佐雄; 佐々木克孝; 阿部良夫; 柳沢英人; 川村みどり; Ozeki Masahiko; Yamane Misao; Sasaki Katsutaka; Abe Yoshio; Yanagisawa Hideto; Kawamura Midori;
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年度 1998
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1. A Study on the Thin-Film Capacitor with High Heatproof Property and High Reliability by Using Anodized Film of Al_3Hf Intermetallic Compound [J] . Masahiko Ozeki, Misao Yamane, Katsutaka Sasaki Electronics & Communications in Japan. 2 . 1999,第4期

机译：Al_3Hf金属间化合物阳极氧化膜对高耐热，高可靠性薄膜电容器的研究
2. Anodization of Al_3Zr intermetallic compound film and its application to the preparation of thin-film capacitors with high reliability [J] . Haruhisa Inada, Misao Yamane, Katsutaka Sasaki Electronics & Communications in Japan. 2 . 2000,第7期

机译：Al_3Zr金属间化合物膜的阳极氧化及其在制备高可靠性薄膜电容器中的应用
3. Dielectric Properties of Zr-AI Anodized Thin Film Capacitors Prepared Using Al-Doped Zr Alloy Films [J] . Hidefumi Kimizaki, Satoko Shinkai, Katsutaka Sasaki, Japanese journal of applied physics . 2010,第10期

机译：Al掺杂Zr合金膜制备Zr-AI阳极氧化薄膜电容器的介电性能
4. Inquiry the Anode Effect on Growth Thin Films on the Flat Glass in D.C Plasma Magnetron Sputtering by Hollow Cathode and Study About Optical Properties of Copper Film Sputtered on the Zinc Substrate in Different Conditions [C] . Bahadori, F., Mahmoudzadeh, . 2005

机译：中空阴极溅射直流等离子体磁控管溅射对平板玻璃生长薄膜阳极效应的影响及不同条件下锌膜溅射铜膜的光学性能研究
5. Thermodynamic and kinetic study on intermetallic compounds palladium-indium and tripalladium-indium: Bulk and thin film cases. [D] . Huang, Mianliang. 2004

机译：金属间化合物钯-铟和三钯-铟的热力学和动力学研究：大包装和薄膜包装。
6. Microstructure and Optical Properties of Nanostructural Thin Films Fabricated through Oxidation of Au–Sn Intermetallic Compounds [O] . Lukasz Skowronski, Marek Trzcinski, Aleksandra Olszewska, 2021

机译：通过氧化Au-Sn金属间化合物制造的纳米结构薄膜的微观结构和光学性质
7. Anodization of Al3Zr Intermetallic Compound Film and Its Application to the Preparation of Thin Film Capacitor with High Reliability [O] . 稲田晴久, 山根美佐雄, 佐々木克孝, 1999

机译：Al3Zr金属间化合物膜的阳极氧化及其在制备高可靠性薄膜电容器中的应用
8. Thin teflon-like films for MEMS: Film properties and reliability studies [R] . Smith, B. K., LaVigne, G., Sniegowski, J. J., 1998

机译：用于mEms的薄聚四氟乙烯薄膜：薄膜特性和可靠性研究

A Study on the thin Film Capacitor with High Heat-Proof Property and High Reliability by Using Anodized Film of Al3Hf Intermetallic Compound

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