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Orientation imaging of macro-sized polysilicon grains on wafers using spatially resolved acoustic spectroscopy

机译:使用空间分辨声谱法在晶圆上对大型多晶硅晶粒进行定向成像

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摘要

Due to its economical production process polysilicon, or multicrystalline silicon, is widely used to produce solar cell wafers. However, the conversion efficiencies are often lower than equivalent monocrystalline or thin film cells, with the structure and orientation of the silicon grains strongly linked to the efficiency. We present a non-destructive laser ultrasonic inspection technique, capable of characterising large (52 x 76 mm2) photocell's microstructure – measurement times, sample surface preparation and system upgrades for silicon scanning are discussed. This system, known as spatially resolved acoustic spectroscopy (SRAS) could be used to optimise the polysilicon wafer production process and potentially improve efficiency.
机译:由于其经济的生产工艺,多晶硅或多晶硅被广泛用于生产太阳能电池晶片。但是,转换效率通常低于等效的单晶或薄膜电池,而硅晶粒的结构和取向与效率密切相关。我们提出了一种无损激光超声检测技术,该技术能够表征大型(52 x 76 mm2)光电管的微观结构-讨论了测量时间,样品表面准备和硅扫描系统升级。这种被称为空间分辨声谱(SRAS)的系统可用于优化多晶硅晶片的生产过程并潜在地提高效率。

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