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A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner

机译:新型压电应变传感器,用于同时对高速纳米定位器进行阻尼和跟踪控制

摘要

This paper presents a novel piezoelectric strain sensor for damping and accurate tracking control of a high-speed nanopositioning stage. Piezoelectric sensors have the benefit of simple interface circuitry, low cost, high sensitivity, and high bandwidth. Although piezoelectric sensors have been successfully used as vibration sensors in smart structures, complications arise when they are used in a feedback loop for tracking. As piezoelectric strain sensors exhibit a capacitive source impedance, a high-pass filter is created, typically with a cut-off frequency of 1 to 10 Hz. This filter can cause significant errors and destabilize a tracking control system. Here, we overcome this problem by using a low-frequency bypass technique to replace the low-frequency component of the strain measurement with an estimate based on the open-loop system. Once the low-frequency filter is accounted for, any standard control system can be applied. In this paper, an analog integral resonant controller together with an integral tracking controller are implemented on a flexure-guided nanopositioner. The resulting closed-loop bandwidth is experimentally demonstrated to be 1.86 kHz. The nanopositioner is installed in an Atomic Force Microscope to obtain open- and closed-loop images at line rates of 40 and 78 Hz. Images recorded in closed loop show a significant improvement due to the elimination of nonlinearity.
机译:本文提出了一种新型的压电应变传感器,用于高速纳米定位台的阻尼和精确跟踪控制。压电传感器的优点是接口电路简单,成本低,灵敏度高和带宽高。尽管压电传感器已经成功地用作智能结构中的振动传感器,但是当将它们用于反馈回路中进行跟踪时,会产生复杂性。由于压电应变传感器具有电容性源阻抗,因此会创建一个高通滤波器,通常具有1至10 Hz的截止频率。该过滤器可能会导致重大错误,并会使跟踪控制系统不稳定。在这里,我们通过使用低频旁路技术以基于开环系统的估算值替代应变测量的低频分量来克服此问题。一旦考虑了低频滤波器,就可以应用任何标准控制系统。在本文中,在挠曲引导的纳米定位器上实现了模拟积分谐振控制器和积分跟踪控制器。实验证明所得的闭环带宽为1.86 kHz。将纳米定位器安装在原子力显微镜中,以40和78 Hz的线速获得开环和闭环图像。由于消除了非线性,闭环记录的图像显示出显着改善。

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