Characterization of silicon dioxide films on 4H-SiC Si (0001) face by cathodoluminescence spectroscopy and x-ray photoelectron spectroscopy

摘要

We measured cathodoluminescence (CL) spectra of SiO2 films grown on 4H-SiC wafers and found that for an acceleration voltage of 5 kV, CL peaks at 460 and 490 nm, assigned to oxygen vacancy centers (OVCs), become weak by post-oxidation annealing in N2O ambient at 1300℃ whereas the CL peak around 580 nm, related to Si-N bonding structures, becomes intense. Furthermore, the peak assigned to N-Si3 configurations in x-ray photoelectron spectroscopy (XPS) spectra was observed in the SiO2/SiC interface in only samples annealed in N2O ambient. These results suggest that the interface trap densities decrease and the channel mobility in n-type MOS capacitors increases by the termination of dangling bonds by the N atom in the SiO2/SiC interface. CL spectroscopy and XPS provide us with extensive information on OVCs and dangling bonds in the SiO2/SiC interface on the 4H-SiC substrate.