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The Study of Chromium Nitride Coating by Asymmetric Bipolar Pulsed DC Reactive Magnetron Sputtering

机译:非对称双极脉冲直流无功磁控溅射镀氮化铬的研究

摘要

Polymers and carbon fibre reinforced polymer (CFRP) composites are used to replacemetallic components in wide range of applications. In most of the applications, the surfaceof the polymers and CFRP composites that interacts require good wear resistance.Coating the surface by chromium nitride known to possess good wear resistance byPulsed DC Reactive Magnetron Sputtering technique is one of the methods suitable forpolymers having low temperature resistance. Adhesion is a challenging part while coatingthe polymers and polymer based composites as polymers are innately hydrophobic havinglow surface energy. Plasma pretreatment of polymer surfaces helps to improve theadhesion. In the present study, the following polymer based substrates were used: vinylester matrix CFRP composites, vinyl ester-thermosetting polymer and thermoplasticpolymers such as polyamide PA), polycarbonate (PC) and polymethyl methacrylate(PMMA). The effect of ion cleaning on adhesion by pull off adhesion tester was analysedwith argon ions for CFRP, and with argon and argon/nitrogen mixture for the polymers.The film stoichiometry is generally found to influence the properties of the coating. Toknow the effect, chromium nitride was deposited at different nitrogen partial pressure onCFRP and polymer substrates. Other than the nitrogen partial pressure, the substratematerial was also found to affect the structure, mechanical properties and wearperformance of the coatings. Depending on the polymer substrate material, therelationship between wear resistance and plastic deformation resistance of the coatingvaried. The wear performance of coatings on CFRP was not well due to the presence ofcarbon fibres near the surface that made the surface rough and inhomogeneous.Asymmetric pulsed DC used for the unbalanced magnetron sputtering technique for thepresent study is known to produce high levels of energetic ion bombardment due to thefluctuations in plasma potential, which occur during the pulse cycle. The bombardmentof the substrate by these ions may have a significant impact on the growing film. The ionfluxes and energies, which impinge on the substrate during the deposition of chromiumwere analyzed using energy resolved mass spectrometry at different pulse frequencies. Itwas found that there was a remarkable increase in ion flux at higher pulse frequencies.The variation of the ion flux with pulse frequency was explained by a simple model. Thebehavior of the ion fluxes on the magnetron centre line and in off-axis position wascompared and was found that on the centre line there was an additional mid energy ionflux, which was not present in the offset position. This change arises from the ion flowdirected along the magnetic field lines from the racetrack region to the substrate or probe position because of the unbalanced magnetron configuration. Chromium nitride wascoated on silicon and glass substrates at different pulse frequencies to know the effect ofion bombardment at off-axis position of the substrate on coating characteristics such asstructure, morphology and mechanical properties. From distortion in structure to changein morphology, roughness, stress and mechanical properties, the ion energy bombardmentwas found to have a significant impact on the coating.
机译:聚合物和碳纤维增强聚合物(CFRP)复合材料可在广泛的应用中替代金属部件。在大多数应用中,相互作用的聚合物和CFRP复合材料的表面要求具有良好的耐磨性。通过脉冲直流反应磁控溅射技术用已知具有良好耐磨性的氮化铬涂层表面是适合具有低温耐受性的聚合物的方法之一。当涂覆聚合物和基于聚合物的复合材料时,由于聚合物是固有的疏水性且具有低表面能,因此粘合是具有挑战性的部分。聚合物表面的等离子体预处理有助于改善附着力。在本研究中,使用了以下基于聚合物的基材:乙烯基酯基CFRP复合材料,乙烯基酯热固性聚合物和热塑性聚合物,例如聚酰胺(PA),聚碳酸酯(PC)和聚甲基丙烯酸甲酯(PMMA)。对于碳纤维增强塑料(CFRP),使用氩离子,对于聚合物,使用氩气和氩气/氮气混合物,分析了离子剥离对附着力测试仪清洁效果的影响。通常发现薄膜的化学计量会影响涂层的性能。要知道这种效果,氮化铬是在不同的氮气分压下沉积在CFRP和聚合物基材上的。除了氮分压以外,还发现基质材料会影响涂层的结构,机械性能和耐磨性能。取决于聚合物基底材料,涂层的耐磨性和抗塑性变形性之间的关系是变化的。 CFRP涂层的磨损性能不佳是因为表面附近存在碳纤维,使表面粗糙且不均匀。已知用于本研究的不平衡磁控溅射技术的不对称脉冲DC会产生高能离子轰击由于在脉冲周期中发生的等离子电势波动。这些离子对基板的轰击可能会对正在生长的薄膜产生重大影响。使用能量分辨质谱法在不同的脉冲频率下分析了在铬沉积过程中撞击到基板上的离子通量和能量。发现在较高的脉冲频率下离子通量显着增加。用一个简单的模型解释了离子通量随脉冲频率的变化。比较了磁控管中心线上和离轴位置上离子通量的行为,发现在中心线上还有一个附加的中能离子通量,在偏移位置上不存在。由于磁控管配置不平衡,这种变化是由于离子沿着磁场线从跑道区域流向基板或探针位置而产生的。在硅和玻璃基板上以不同的脉冲频率涂覆氮化铬,以了解在基板偏轴位置的离子轰击对涂层特性(如结构,形态和机械性能)的影响。从结构变形到形态,粗糙度,应力和机械性能的变化,发现离子能轰击对涂层有重大影响。

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