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Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)

机译：基于钛酸锆钛酸铅（PZT）的自驱动压电纳米机电谐振器的晶圆级制备

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机译：国际观众

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DEZEST Denis; Thomas Olivier; MATHIEU Fabrice; Mazenq Laurent; Soyer Caroline; Costecalde Jean; Remiens Denis; Deü Jean-François; Nicu Liviu;
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年度 2015
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正文语种 en
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1. Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT) [J] . Dezest D., Thomas O., Mathieu F., Journal of Micromechanics and Microengineering . 2015,第3期

机译：基于钛酸锆钛酸铅（PZT）的自驱动压电纳米机电谐振器的晶圆级制造
2. Fabrication and characterization of PZT (lead zirconate titanate) bridge-shaped resonator for mass sensing application [J] . Dong Gun Hwang, Youn Mee Chae, Kyo Seon Hwang, Journal of electroceramics . 2012,第3期

机译：用于质量传感应用的PZT（钛酸锆钛酸铅）桥形谐振器的制作与表征
3. Fabrication and characterization of PZT (lead zirconate titanate) bridge-shaped resonator for mass sensing application [J] . Dong Gun Hwang, Youn Mee Chae, Kyo Seon Hwang, Journal of Electroceramics . 2012,第3期

机译：用于质量传感应用的PZT（钛酸锆钛酸铅）桥形谐振器的制造与表征
4. Piezoelectric Lead Zirconate Titanate (PZT) Ring Shaped Contour-Mode MEMS Resonators [C] . P.V. Kasambe, V. V. Asgaonkar, A. D. Bangera International Conference on Advances in Materials and Manufacturing Applications . 2018

机译：压电铅锆钛酸钛酸盐（PZT）环形轮廓模式MEMS谐振器
5. Design, fabrication, test, and evaluation of RF MEMS series switches using lead zirconate titanate (PZT) thin film actuators [D] . Polcawich, Ronald G. 2007

机译：使用钛酸锆钛酸铅（PZT）薄膜致动器的RF MEMS系列开关的设计，制造，测试和评估
6. Phase Evolution Filler-Matrix Interactions and Piezoelectric Properties in Lead Zirconate Titanate (PZT)-Filled Polymer-Derived Ceramics (PDCs) [O] . Franziska Eichhorn, Simone Kellermann, Ulf Betke, 2020

机译：锆钛酸铅（PZT）填充的聚合物衍生陶瓷（PDC）中的相变填料-基体相互作用和压电特性
7. Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT) [O] . D Dezest, O Thomas, F Mathieu, 2015

机译：基于锆钛酸铅（PZT）的自驱动压电纳米机电谐振器的晶片规模制造
8. Piezoelectric MEMS Microphone Based on Lead Zirconate Titanate (PZT) Thim Films [R] . Polcawich, R. G. 2004

机译：基于锆钛酸铅（pZT）薄膜的压电mEms麦克风

Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)

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