Differential ion pumping for vacuum deposition

机译：差动离子泵浦用于真空沉积

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摘要

Feasibility of differential ion pumping concept for reducing pressure during vacuum deposition of thin films

机译：差动离子泵概念在薄膜真空沉积过程中降低压力的可行性

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作者
Leonard W. F.;
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年度 1968
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专利

1. Differential Ion Pumping for Vacuum Deposition [J] . Leonard W. F. Review of Scientific Instruments . 1969,第1期

机译：差动离子泵用于真空沉积
2. Windowless transition between atmospheric pressure and high vacuum via differential pumping for synchrotron radiation applications [J] . Gog T, Casa DM, Kuzmenko I, Journal of synchrotron radiation . 2007,第Pta4期

机译：通过差动泵在大气压和高真空之间实现无窗过渡，用于同步加速器辐射应用
3. Development of ultrahigh vacuum floating-type low-energy ion gun with differential pumping facilities for high-resolution depth profiling [J] . Mizuhara Y, Bungo T, Nagatomi T, Surface and Interface Analysis: SIA: An International Journal Devoted to the Development and Application of Techniques for the Analysis of Surfaces, Interfaces and Thin Films . 2005,第2期

机译：超高真空浮动式低能离子枪的研制，该枪具有差动抽气装置，用于高分辨率深度剖析
4. Construction and Design of Split Flow Molecular Vacuum Pump Fit to Pumping in Differential Inlet Pressure [C] . LIU Kun, WU Chun-mei, ZHAO Long-chao, 第九届真空冶金与表面工程学术会议 . 2009

机译：适合进口压差的分流式分子真空泵的构造与设计
5. BYU Diesel Engine Lab Setup and Parasitic Losses of the Water Pump and Vacuum Pump on a Cummins 2.8 L Engine [D] . ?Jessup, Eric Ashton 2020

机译：BYU柴油发动机实验室设置和康明斯2.8 L发动机上水泵和真空泵的寄生损失
6. Differentially pumped spray deposition as a rapid screening tool for organic and perovskite solar cells [O] . Yen-Sook Jung, Kyeongil Hwang, Fiona H. Scholes, -1

机译：差分泵浦喷涂沉积作为有机和钙钛矿太阳能电池的快速筛选工具
7. A Differentially-Pumped Low-Energy Ion-Beam System for an Ultra-High Vacuum (UHV) Atom-Probe Field-Ion Microscope [O] . Jun Amano, David N. Seidman 1978

机译：用于超高真空（UHV）原子探针现场离子显微镜的差动泵浦的低能量离子束系统
8. Differential Ion Pumping for Vacuum Deposition [R] . Leonard, W. F. 1968

机译：用于真空沉积的差分离子泵

Differential ion pumping for vacuum deposition

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