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Optical detectors for GaAs MMIC integration: Technology assessment

机译:用于GaAs MMIC集成的光学探测器:技术评估

摘要

Fiber optic links are being considered to transmit digital and analog signals in phased array antenna feed networks in space communications systems. The radiating elements in these arrays will be GaAs monolithic microwave integrated circuits (MMIC's) in numbers ranging from a few hundred to several thousand. If such optical interconnects are to be practical it appears essential that the associated components, including detectors, be monolithically integrated on the same chip as the microwave circuitry. The general issue of monolithic integration of microwave and optoelectronic components is addressed from the point of view of fabrication technology and compatibility. Particular attention is given to the fabrication technology of various types of GaAs optical detectors that are designed to operate at a wavelength of 830 nm.
机译:人们正在考虑使用光纤链路在空间通信系统中的相控阵天线馈电网络中传输数字和模拟信号。这些阵列中的辐射元件将是GaAs单片微波集成电路(MMIC),其数量从几百到几千不等。如果这样的光学互连是实用的,则包括检测器在内的相关组件与微波电路单片集成在同一芯片上似乎是必不可少的。从制造技术和兼容性的观点出发,解决了微波和光电组件的单片集成的一般问题。特别注意设计用于工作在830 nm波长的各种类型的GaAs光学检测器的制造技术。

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  • 作者

    Claspy P. C.; Bhasin K. B.;

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  • 年度 1989
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