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Comparative Mirror Cleaning Study: 'A Study on Removing Particulate Contamination'

机译:比较镜清洁研究:“去除微粒污染物的研究”

摘要

The cleanliness of optical surfaces is recognized as an industry-wide concern for the performance of optical devices such as mirrors and telescopes, microscopes and lenses, lasers and interferometers, and prisms and optical filters. However, no standard has been established for optical cleaning and there is no standard definition of a 'clean' optical element. This study evaluates the effectiveness of commonly used optical cleaning techniques based on wafer configuration, contamination levels, and the number and size of removed particles. It is concluded that cleaning method and exposure time play a significant factor in obtaining a high removal percentage. The detergent bath and solvent rinse method displayed an increase in effective removal percentage as the contamination exposure increased. Likewise, CO2 snow cleaning showed a relatively consistent cleaning effectiveness. The results can help ensure mission success to flight projects developed for the NASA Origins Program. Advantages and disadvantages of each of the optical cleaning methods are described.
机译:光学表面的清洁度已被公认为是整个行业关注的光学器件,例如镜子和望远镜,显微镜和透镜,激光和干涉仪以及棱镜和滤光器的性能。但是,尚未建立光学清洁的标准,也没有“清洁”光学元件的标准定义。这项研究基于晶片配置,污染水平以及去除的颗粒的数量和大小,评估了常用光学清洁技术的有效性。结论是清洗方法和暴露时间是获得高去除率的重要因素。随着污染暴露的增加,洗涤剂浴和溶剂漂洗方法显示出有效去除百分比的增加。同样,二氧化碳除雪清洁显示出相对一致的清洁效果。结果可以帮助确保为NASA起源计划开发的飞行项目成功完成任务。描述了每种光学清洁方法的优缺点。

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    Houston Karrie;

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  • 年度 2007
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