Combining Medium Energy Ion Scattering measurements with TRIDYN dynamic modelling to characterise a plasma doping process

摘要

MEIS (Medium Energy Ion Scattering) analysis has the great advantage over other profilingudmethods such as SIMS and dynamic XPS and in that it can measure the absolute number of atomsudin a sample without the complications of sputtering and matrix dependent effects, which areudparticularly important in shallow samples. Profiling by TEM/EDS does not suffer from theseudeffects, but can only quantify profiles as atomic fractions. MEIS spectra can be transformed intouddepth profiles in terms of layers containing a number of atoms per unit area; converting such dataudto report layers of different thicknesses and atomic concentrations requires knowledge of the localuddensity in each layer which is information strictly not contained in a straightforward MEIS energyudspectrum.