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Direct laser writing of three-dimensional network structures as templates for disordered photonic materials

机译:直接激光写入三维网络结构作为无序光子材料的模板

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摘要

In the present article we substantially expand on our recent study about the fabrication of mesoscale polymeric templates of disordered photonic network materials [Haberko and Scheffold, Opt. Expr. 21, 1057 (2013)]. We present a detailed analysis and discussion of important technical aspects related to the fabrication and characterization of these fascinating materials. Compared to our initial report we were able to reduce the typical structural length scale of the seed pattern from a=3.3μm to a=2μm, bringing it closer to the technologically relevant fiber-optic communications wavelength range around λ∼1.5μm. We have employed scanning electron microscopy coupled with focused ion beam cutting to look inside the bulk of the samples of different heights. Moreover, we demonstrate the use of laser scanning confocal microscopy to assess the real space structure of the samples fabricated by direct laser writing. We address in detail questions about scalability, finite size effects, and geometrical distortions. We also study the effect of the lithographic voxel shape, that is, the ellipsoidal shape of the laser pen used in the fabrication process. To this end we employ detailed numerical modeling of the scattering function using a discrete dipole approximation scheme.
机译:在本文中,我们将对有关无序光子网络材料的中尺度聚合物模板的制造进行最新研究[Haberko and Scheffold,Opt。 Expr。 21,1057(2013)]。我们对与这些引人入胜的材料的制造和表征有关的重要技术方面进行了详细的分析和讨论。与我们的最初报告相比,我们能够将种子图案的典型结构长度尺度从a =3.3μm减小到a =2μm,使其更接近技术相关的光纤通信波长范围,即λ〜1.5μm。我们采用扫描电子显微镜结合聚焦离子束切割技术,以查看不同高度的大部分样品。此外,我们演示了使用激光扫描共聚焦显微镜评估通过直接激光写入制作的样品的真实空间结构。我们将详细解决有关可伸缩性,有限尺寸效果和几何变形的问题。我们还研究了光刻体素形状(即在制造过程中使用的激光笔的椭圆形)的影响。为此,我们采用离散偶极近似方案对散射函数进行了详细的数值建模。

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