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Large area periodic, systematically changing, multishape nanostructures by laser interference lithography and cell response to these topographies

机译:大面积周期性,系统改变的多形纳米结构,通过激光干涉光刻和对这些形貌的细胞响应

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摘要

The fabrication details to form large area systematically changing multishape nanoscale structures on a chip by laser interference lithography (LIL) are described. The feasibility of fabricating different geometries including dots, ellipses, holes, and elliptical holes in both x- and y- directions on a single substrate is shown by implementing a Lloyd\u27s interferometer. The fabricated structures at different substrate positions with respect to exposure time, exposure angle and associated light intensity profile are analyzed. Experimental details related to the fabrication of symmetric and biaxial periodic nanostructures on photoresist, silicon surfaces, and ion milled glass substrates are presented. Primary rat calvarial osteoblasts were grown on ion-milled glass substrates with nanotopography with a periodicity of 1200 nm. Fluorescent microscopy revealed that cells formed adhesions sites coincident with the nanotopography after 24 h of growth on the substrates. The results suggest that laser LIL is an easy and inexpensive method to fabricate systematically changing nanostructures for cell adhesion studies. The effect of the different periodicities and transition structures can be studied on a single substrate to reduce the number of samples significantly.
机译:描述了通过激光干涉光刻(LIL)在芯片上形成大面积系统改变多形纳米尺度结构的制造细节。通过实施劳埃德(Lloyd)干涉仪,可以显示在单个基板上制造x和y方向上包括点,椭圆,孔和椭圆形孔的不同几何形状的可行性。分析相对于曝光时间,曝光角度和相关的光强度分布在不同基板位置处的制造结构。提出了与在光致抗蚀剂,硅表面和离子研磨的玻璃基板上制备对称和双轴周期性纳米结构有关的实验细节。原始大鼠颅盖成骨细胞在具有纳米形貌的离子铣削玻璃基板上生长,周期为1200 nm。荧光显微镜显示,在基底上生长24小时后,细胞形成的粘附位点与纳米形貌相吻合。结果表明,激光LIL是一种容易且便宜的方法,可用于制造系统变化的纳米结构用于细胞粘附研究。可以在单个基板上研究不同周期性和过渡结构的影响,以显着减少样本数量。

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