Miniaturisiertes Weißlicht-Interferometer mit hoher Messfrequenz für die absolute Abstandsmessung

摘要

The presented dissertation deals with the conception and development of miniaturized white-light interferometry for absolute distance measurement. Initial point of the work is the definition of measurement range, working distance, resolution etc. This is important for chracterise the system from the point of view of the user. Looking at the state of the art it becomes clear that only fiber-optical system can reach the tasks. But it becomes also clear, that existing measuring systems are not aible to reach the defined requirements. So the next point of the work is the analysis of the theoretical base of different measurement principles regarding the ability for the target of a miniaturized measurement system. Here the princip of frequency- and wave-modulation is appropiate. The modulation form includes also the white-light interferometry. Based on the state of the art and the measurement princip four priorities are selected. 1. Design of miniaturised Fabry-Perot-interferometer as the sensor tip with integrated optics for collimating the sensor beam. 2. Anaylsis of the interaction between beam and surface of the measurement object, for investigate the effect of polarisation and diffraction. As well as the investigation of different reflexion attidudes of the surface influencing the function of the system. 3. Development of an electronical scanner for eliminating all mechanical moved parts. Goal is a significant higher measuring frequency only depending on the used sensor. 4. Construction of further optical components with a special focus on the interaction with the selcted sensor type.