Investigation on the formation of tungsten carbide in tungsten-containing diamond like carbon coatings

摘要

A series of tungsten-containing diamond-like carbon (Me-DLC) coatings have been produced by unbalanced magnetron sputtering using a Hauzer HTC-1000 production PVD system. Sputtering from WC targets has been used to form W-C:H coatings. The metal to carbon ratio has been varied to study changes in the metal carbide formation and distribution within the amorphous hydrocarbons (a-C:H) matrix. The difference in the formation of the metal carbide is then linked to changes in the mechanical and tribological properties of the coatings. Detailed high-resolution cross-section TEM has been carried out to analyze the microstructure of the coatings. By changing the amount of a-C:H in the W-C:H coatings, the coefficient of friction could be varied between 0.129 and 0.312. The hardness was found to vary between 8 and 27.5 GPa by using different acetylene gas flows. It was observed that all coatings did have a pronounced multilayered structure.