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Fabrication of Lithographically-defined Optical Coupling Facets for SOI Waveguides by ICP Etching

机译：通过ICP刻蚀制造SOI波导的光刻定义的光学耦合面

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Peer reviewed: No

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Yap K. P.; Lamontagne Boris; Delue2ge Andrue9; Janz Siegfried; Bogdanov Alexei; Picard Michel; Post Edith; Chow-Chong Phillip; Malloy Mark; Roth Daniel; Marshall Paul; Liu K. Y.; Syrett B.;
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年度 2006
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1. Optimizing SOI Slot Waveguide Fabrication Tolerances and Strip-Slot Coupling for Very Efficient Optical Sensing [J] . Mario La Notte, Vittorio M. N. Passaro Sensors . 2012,第3期

机译：优化SOI缝隙波导制造公差和带缝耦合，以实现非常高效的光学传感
2. Synchronous etching-epitaxial growth fabrication of facet-coupling NaTaO3/Ta2O5 heterostructured nanofibers for enhanced photocatalytic hydrogen production [J] . Xu Leilei, Sun Xiaoli, Tu Hao, Applied Catalysis, B. Environmental: An International Journal Devoted to Catalytic Science and Its Applications . 2016,第Null期

机译：面耦合NaTaO3 / Ta2O5异质结构纳米纤维的同步刻蚀-外延生长制备以增强光催化制氢
3. Optical Waveguide End Facet Roughness and Optical Coupling Loss [J] . Baghsiahi, H., Wang, Journal of Lightwave Technology . 2013,第16期

机译：光波导端面的粗糙度和光耦合损耗
4. Fabrication of SOI Optical Waveguide Devices by Anisotropic Chemical Etching [C] . Jinsong Xia, Jinzhong Yu, Shaowu Chen, Joint Symposium on Opto- and Microelectronics Devices and Circuits . 2004

机译：通过各向异性化学蚀刻制造SOI光波导装置
5. Optical properties of lithium niobate waveguides, and prism coupling for optimizing waveguide fabrication. [D] . Kwiatkowski, Stephen Lawrence. 1995

机译：铌酸锂波导的光学特性，以及用于优化波导制造的棱镜耦合。
6. Optimizing SOI Slot Waveguide Fabrication Tolerances and Strip-Slot Coupling for Very Efficient Optical Sensing [O] . Vittorio M. N. Passaro, Mario La Notte 2012

机译：优化SOI缝隙波导制造公差和带缝耦合以实现非常高效的光学传感
7. Optimizing SOI slot waveguide fabrication tolerances and strip-slot coupling for very efficient optical sensing [O] . Vittorio M. N. Passaro, Mario La Notte 2014

机译：优化SOI缝隙波导制造公差和条缝耦合，以实现非常有效的光学传感
8. Optical Properties of Lithium Niobate Waveguides, and Prism Coupling forOptimizing Waveguide Fabrication [R] . 1995

机译：铌酸锂波导的光学特性和用于优化波导制造的棱镜耦合

Fabrication of Lithographically-defined Optical Coupling Facets for SOI Waveguides by ICP Etching

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