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Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching method

机译：质子束写入结合电化学刻蚀法制备的硅基光子晶体

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Zhiya Dang; Mark BH Breese; Gonzalo Recio-Sánchez; Sara Azimi; Jiao Song; Haidong Liang; Agnieszka Banas; Vicente Torres-Costa; Raúl Martín-Palma;
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1. Photonic crystals in lithium niobate by combining focussed ion beam writing and ion-beam enhanced etching [J] . Reinhard Geiss, Severine Diziain, Michael Steinert, Physica status solidi . 2014,第10期

机译：结合聚焦离子束写入和离子束增强蚀刻的铌酸锂中的光子晶体
2. Spontaneous emission control of silicon nanocrystals by silicon three-dimensional photonic crystal structure fabricated by self-aligned two-directional electrochemical etching method [J] . Daihei Hippo, Kei Urakawa, Yoshishige Tsuchiya, Materials Chemistry and Physics. . 2009,第1期

机译：自对准双向电化学刻蚀法制备的硅三维光子晶体结构自发控制硅纳米晶体
3. All-silicon subwavelength structural coloration fabricated through proton beam writing and reactive ion etching [J] . Jintao Gong, Huining Jin, Chengyuan Yang, Nuclear Instruments & Methods in Physics Research . 2020,第Apra15期

机译：通过质子束写入和反应离子刻蚀制备的全硅亚波长结构着色
4. Three-dimensional silicon-based photonic crystals fabricated by electrochemical etching [C] . Matthias S., Muller F., Hillebrand R., Group IV Photonics, 2004. First IEEE International Conference on . 2004

机译：通过电化学蚀刻制备的三维硅基光子晶体
5. A theoretical investigation of a dual-beam holographic lithography method for the fabrication of omnidirectional photonic crystals. [D] . Mnaymneh, Khaled. 2003

机译：用于全向光子晶体制造的双光束全息光刻方法的理论研究。
6. Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching method [O] . Zhiya Dang, Mark BH Breese, Gonzalo Recio-Sánchez, 2012

机译：质子束写入结合电化学刻蚀法制备的硅基光子晶体
7. Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching method [O] . Dang, Zhiya, Breese, Mark, BH, Recio-Sánchez, Gonzalo, 2012

机译：采用质子束写入结合电化学蚀刻方法制备的硅基光子晶体

Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching method

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