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Deposition of F-doped ZnO transparent thin films using ZnF2-doped ZnO target under different sputtering substrate temperatures

机译：ZnF2掺杂的ZnO靶在不同溅射衬底温度下沉积F掺杂的ZnO透明薄膜

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Fang-Hsing Wang; Cheng-Fu Yang; Yen-Hsien Lee;
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1. Room temperature sputtering deposition of high-haze Ga-doped ZnO transparent conductive thin films on self-textured bio-based poly(ethylene 2,5-furandicarboxylate) substrates [J] . Zhu Chaoting, Zhou Jingru, Li Jia, CERAMICS INTERNATIONAL . 2018,第1期

机译：高雾霾GA掺杂ZnO透明导电薄膜的室温溅射沉积在自纹理生物基聚（乙烯2,5-呋喃羧酸甲酯）基材上
2. Room-temperature deposition of flexible transparent conductive Ga-doped ZnO thin films by magnetron sputtering on polymer substrates [J] . Li Gong, Yun-Zhen Liu, Fang-Yang Liu, Journal of materials science . 2017,第8期

机译：磁控溅射在聚合物基底上室温沉积柔性透明导电掺杂Ga的ZnO薄膜
3. Low substrate temperature deposition of transparent and conducting ZnO:Al thin films by RF magnetron sputtering [J] . Ravindra Waykar, Amit Pawbake, Rupali Kulkarni, Journal of Semiconductors . 2016,第4期

机译：射频磁控溅射法在低温度下沉积透明导电ZnO：Al薄膜
4. Deposition of ZnO Thin Film at Different Substrate Temperature Using RF Sputtering for Growth of ZnO Nanorods Using Hydrothermal Method for UV Detection [C] . Basavaraj S. Sannakashappanavar, C. R. Byrareddy, Sanjit Varma, Control instrumentation systems conference . 2020

机译：使用RF溅射在不同衬底温度下沉积ZnO薄膜，使用用于UV检测的水热法生长ZnO纳米棒的生长
5. Semi-transparent zinc oxide:aluminum/copper(I) oxide thin-film heterojunction fabricated at low temperature: Effect of an intrinsic ZnO buffer layer at the junction [D] . Huang, Yu-Nung 2011

机译：半透明氧化锌：低温制备的铝/铜（I）氧化物薄膜异质结：结处本征ZnO缓冲层的作用
6. Deposition of F-doped ZnO transparent thin films using ZnF2-doped ZnO target under different sputtering substrate temperatures [O] . Fang-Hsing Wang, Cheng-Fu Yang, Yen-Hsien Lee 2014

机译：ZnF2掺杂的ZnO靶在不同溅射衬底温度下沉积F掺杂的ZnO透明薄膜
7. Deposition of F-doped ZnO transparent thin films using ZnF2-doped ZnO target under different sputtering substrate temperatures [O] . Wang Fang-Hsing, Yang Cheng-Fu, Lee Yen-Hsien 2015

机译：Deposition of F-doped ZnO transparent thin films using ZnF2-doped ZnO target under different sputtering substrate temperatures

Deposition of F-doped ZnO transparent thin films using ZnF2-doped ZnO target under different sputtering substrate temperatures

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