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XPS Depth Profile Analysis of ZnN Thin Films Grown at Different N/Ar Gas Flow Rates by RF Magnetron Sputtering

机译：射频磁控溅射在不同N / Ar气体流量下生长的ZnN薄膜的XPS深度剖面分析

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1. XPS Depth Profile Analysis of Zn3N2 Thin Films Grown at Different N2/Ar Gas Flow Rates by RF Magnetron Sputtering [J] . M. Baseer Haider Nanoscale Research Letters . 2017,第1期

机译：射频磁控溅射在不同N 2 / Ar气体流速下生长的Zn 3 N 2 薄膜的XPS深度剖面分析
2. The influence of Ar pressure on the structure and optical properties of non-hydrogenated a-Si thin films grown by rf magnetron sputtering onto room-temperature glass substrates [J] . Marquez E., Saugar E., Diaz J. M., Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites . 2019,第期

机译：RF磁控溅射在室温玻璃基板上生长的非氢化A-Si薄膜结构和光学性能的影响
3. Non-uniform sputtering and degradation of depth resolution during GDOES depth profiling analysis of thin anodic alumina films grown over rough substrates [J] . Shimizu K., Skeldon P., Thompson G.E., Surface and Interface Analysis: SIA: An International Journal Devoted to the Development and Application of Techniques for the Analysis of Surfaces, Interfaces and Thin Films . 1999,第10期

机译：在粗糙基底上生长的阳极氧化铝薄膜的GDOES深度轮廓分析过程中，溅射不均匀且深度分辨率降低
4. Dielectric properties of AlNx thin films prepared by RF magnetron sputtering of Al using a N2/Ar sputtering gas mixture [C] . R.D. Gould* S.A. Awan International Conference on Metallurgical Coatings and Thin Films . 2006

机译：使用N2 / AR溅射气体混合物通过RF磁控溅射制备的ALNX薄膜的介电性能
5. Characterization of GaN thin films grown by RF Magnetron Sputtering for fabrication of an AlGaN/GaN HEMT biosensor [D] . Garza, Rocio Yolanda 2014

机译：射频磁控溅射生长的GaN薄膜的特性用于制造AlGaN / GaN HEMT生物传感器
6. XPS Depth Profile Analysis of Zn3N2 Thin Films Grown at Different N2/Ar Gas Flow Rates by RF Magnetron Sputtering [O] . M. Baseer Haider 2017

机译：射频磁控溅射在不同N2 / Ar气体流量下生长的Zn3N2薄膜的XPS深度剖面分析
7. Properties of ZnO Thin Films Grown by Radio-frequency Magnetron Sputtering in terms of O2/Ar Mixture Flow Ratio [O] . 2007

机译：通过射频磁控溅射在O2 / AR混合比率方面所生长的ZnO薄膜的性质

XPS Depth Profile Analysis of ZnN Thin Films Grown at Different N/Ar Gas Flow Rates by RF Magnetron Sputtering

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