Wideband 94 GHz on-chip dipole antennas for imaging applications

摘要

Microstrip on-chip dipole antennas with L and T shapes are designed and implemented to operate at W band with large bandwidths for imaging applications. On-chip antennas are manufactured using IHP SiGe BiCMOS run and localized back etching technique for removal of lossy silicon under the antenna. Measured return losses are in good agreement with simulated ones and antennas operate at 95.5 GHz with 15 GHz and 25 GHz (or more) 10dB-bandwidth for L and T antennas, respectively.