The Influence of Thickness of the Layers on Structural-Phase and Strained State of Multiperiod Nanolayer Ti/TiN Coatings

摘要

The influence of condition of vacuum-arc multi-layer TiN/Ti coatings on their phase composition, structure,udstress state and mechanical properties has been studied. The regularities of the phase composition,udstructural state of stress, hardness with dependence on the magnitude of the negative bias applied to theudsubstrate during the deposition and the thickness of the Ti and TiN layers in a multilayer coating were obtained.udThe analysis of the causes of observed changes, based on the mechanism of formation of surfaceudlayers of vacuum-arc coatings in the condition of implantation processes stimulated by applying a negativeudbias to the substrate was held.When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/34814