Structural Features Amorphous-like Coatings AlN-TiB2-TiSi2 After Annealing (900, 1300)ºC and their Impact on Physical and Mechanical Properties Changes

摘要

The magnetron sputtered coatings on base AlN-TiB2(TiSi2) were investigated. The element composition, structural-phase composition, morphology were investigated before and after annealing of coatings with 9000C, 13000C using SEM/EDS, AFM, SIMS, XRD, 3D Laser, Nanoindenter. The concentrations of elements in the coating were changed after annealing under 9000C and further annealing under 13000C. Achieving viscoplastic index of 0.07 value when the hardness H = 15.3 GPa, provides high damping properties of the coating, wherein an amorphous structure is promising to use coatings such as diffusion barriers in the form of separate elements or as a layer in contact of multilayer wear resistant coatings.