We report on nanostructured films of Al doped tin oxide grown by facile spray pyrolysis route, and their physical properties are investigated. The sprayed films are grown onto ITO substrate at 300°C from (SnCl4, 5H2O)as precursor. The content of Aludis kept at 3 % in the solution. Structural, optical, electrical and surface properties are investigated. X-rays pattern reveals polycrystalline structure and SnO2 phase occurence.udThe visible transmitance exceeds 85%, the band gap is 3.7 eV.Nanotips are observed by 3D atomic force microscope (AFM) picture. The films exhibits very low resistivity found to be 9.85 10-5u10009f.cm, a high electron concentration around 1021cm-3, and low mobility 20 cm2/Vs.When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/20530
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