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Small-scale Vacuum System for Deposition of Multilayer Metallic Films “MVU TM – Magna 3M”

机译：用于沉积多层金属膜的小型真空系统“ MVU TM – Magna 3M”

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A new small-scale vacuum system “MVU TM-Magna 3M” developed at JSC “Research Institute of Pre-cision Machine Manufacturing” is described. Its assembly and working conditions are considered. This sys-tem was used for magnetron sputtering multilayer metallic films.When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/36126

机译：描述了由JSC“精密机器制造研究所”开发的新型小型真空系统“ MVU TM-Magna 3M”。考虑其组装和工作条件。该系统用于磁控溅射多层金属膜。引用本文档时，请使用以下链接http://essuir.sumdu.edu.ua/handle/123456789/36126

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Odinokov V.V.; Pavlov G.Ya.; Panin V.V.; Raschinsky V.P.; Shpakov A.N.; Shubnikov A.V.;
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年度 2014
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正文语种 en
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Small-scale Vacuum System for Deposition of Multilayer Metallic Films “MVU TM – Magna 3M”

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