Investigations of the effect of generation and reflection of bulk acoustic waves (BAWs) on the performance surface acoustic wave (SAW) device using finite element method (FEM) simulation is carried out. A SAW delay line structure using Aluminum Nitride (AlN) substrate is simulated. The dimension of the device is kept in the range of the 42 22.5 m in order to analyze the effect in MEMS devices. The propagation of the bulk wave in all the direction of the substrate is studied and analyzed. Since BAW reflect from the bottom of the SAW device and interfere with the receiving IDTs. The output of the SAW device is greatly affected by the interference of the BAW with SAWs in the device. Thus in SAW devices, BAW needed to be considered before designing the device.When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/31004
展开▼
机译：利用有限元方法（FEM）模拟研究了体声波（BAW）的产生和反射对性能表面声波（SAW）器件的影响。模拟了使用氮化铝（AlN）衬底的声表面波延迟线结构。器件的尺寸保持在42 the 22.5μm的范围内，以便分析MEMS器件中的影响。研究并分析了体波在衬底所有方向上的传播。由于BAW从SAW设备的底部反射并干扰接收IDT。 SAW设备的输出受到BAW对设备中SAW的干扰的极大影响。因此，在SAW设备中，在设计设备之前需要考虑BAW。在引用文档时，请使用以下链接http://essuir.sumdu.edu.ua/handle/123456789/31004
展开▼
