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Multilayer design of CrN/MoN protective coatings for enhanced hardness and toughness

机译:CrN / MoN保护涂层的多层设计,可提高硬度和韧性

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摘要

We report on CrN/MoN multilayer coatings, their structure, elemental and phase composition, residual stresses, mechanical properties and their dependence on deposition conditions. The hardness and toughness were considered as main parameters for improvement of the protective properties of coatings. Multilayers with varying bilayer periods, ranging from 40 nm to 2.2 μm, were obtained by using cathodic arc physical vapour deposition (Arc-PVD) on stainless steel substrate. The elemental analysis was performed using wavelength-dispersive X-ray spectroscopy (WDS). The surface morphology and cross-sections were analysed with scanning electron microscopy (SEM). The X-ray diffraction (XRD) measurements, including grazing incidence X-ray diffraction (GIXRD), in-plane diffraction analysis and electron backscatter diffraction (EBSD), were used for microstructure characterisation. Mechanical properties of deposited films were studied by measuring hardness (H) and Young's modulus (E) with micro-indentation, H/E and H3/E2 ratios were calculated. The dependences of internal structure and, hence, mechanical properties, on layer thickness of films have been found. Significant enhancement of hardness and toughness was observed with decreasing individual layer thickness to 20 nm: H = 38–42 GPa, H/E = 0.11.
机译:我们报告了CrN / MoN多层涂层,其结构,元素和相组成,残余应力,机械性能及其对沉积条件的依赖性。硬度和韧性被认为是改善涂层防护性能的主要参数。通过在不锈钢基板上使用阴极电弧物理气相沉积(Arc-PVD)获得双层周期从40 nm到2.2μm不等的多层。元素分析使用波长色散X射线光谱法(WDS)进行。用扫描电子显微镜(SEM)分析表面形态和横截面。 X射线衍射(XRD)测量(包括掠入射X射线衍射(GIXRD),面内衍射分析和电子背散射衍射(EBSD))用于微结构表征。通过用显微压痕测量硬度(H)和杨氏模量(E)来研究沉积膜的机械性能,计算出H / E和H3 / E2比。已经发现内部结构以及因此的机械性能对薄膜层厚度的依赖性。观察到硬度和韧性的显着提高,各层厚度减小至20 nm:H = 38–42 GPa,H / E = 0.11。

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