The aim is to provide failure analysis of power devices based on real-time monitoring. The real-time monitoring provides a time-domain data related to a failure mechanism. The data includes important information about primary failure, which is often lost by conventional post-defect failure analysis. Our system monitors interfaces of component material inside the device by scanning acoustic tomography (SAT) under a power cycling test in addition to electrical and thermal condition of the device. A precursor of the failure in an early stage was indicated by the interface image much earlier than a thermal and an electrical technique. Feature identification and extraction from a series of image data by image processing efficiently pointed out the damaged site before the failure was occurred.
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