Properties of Coatings Deposited from Filtered Vacuum Arc Plasma with HEA Cathode

摘要

Ti-V-Zr-Nb-Hf metallic and nitride films were deposited by filtered vacuum arc plasma from a singleudequiatomic HEA cathode. The composition, microstructure, mechanical properties, thermal stability andudcorrosion properties were investigated.udThe deposited metallic film has a two-phase structure with bcc and hcp-lattice. The nitride films wereudfound to have only an fcc structure. All coatings have nano-grained structures, with grain sizes 5 nm forudmetallic and 36 nm for nitride. The nitride coatings have a compressive stress of around – 12,5 GPa, highudhardness ~ 40 GPa and elastic modulus ~ 450 GPa. After annealing in vacuum in range 400-1200 °C, 3 hudfor every temperature, hardness decreased to 25 GPa. It was found that both the metallic and nitride coatingsudexhibited their best corrosion resistance than steel samples in a 3,5 wt. % NaCl solution. The metallicudcoatings showed better corrosion resistance than the nitride coatings.When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35323