The evolution of free copper atomic clusters under low energy Ar ion bombardment is simulated using the classical molecular dynamics. The clusters consisting of 26, 78, and 390 atoms have been studied at a impact energy ranging from 1 to 800 eV. Interatomic interactions between copper atoms were described by the many body Ackland potential, whereas the interaction of copper atoms with argon ions has been described using the Ziegler–Biersack–Littmark potential. Time dependences of the temperature and potentialudenergy as well as values of sputtering yields of free clusters under the ion bombardment have been simulated.
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