Structural-phase and Strained State of Vacuum-ARC Mo-N Coatings

摘要

The effect of substrate bias on the structural-phase and elastic stress-strained state during the formationudof vacuum-arc deposited nanostructural coatings of the Mo–N system has been studied. An increaseudin the bias potential leads to (i) predominant [111] orientation of the growing molybdenum nitrideudcrystals with a NaCl-type cubic lattice (γ-Mo2N phase) and (ii) the appearance of a second phase with audbody-centered cubic crystal lattice that is characteristic of pure molybdenum. The elastically strainedud(stressed) state of the coating is determined not only by the conditions of deposition, but also by the mechanicaludproperties of a substrate. In order to provide for formation of coatings in a high-elastic-strainedud(stressed) state, it is necessary to deposit coatings onto substrates with high elastic modulus, which preventudmetal flow at the interface.When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/34806