Physical and Mechanical Properties of (Ti-Zr-Nb)N Coatings, Fabricated by Vacuum-Arc Deposition

摘要

The coatings based on (Ti-Zr-Nb)N were fabricated by vacuum-arc deposition of the Ti+Zr+Nb cathodes inudthe nitrogen atmosphere. Their physical and mechanical properties as well as tribological characteristics haveudbeen studied. The coatings are characterized by a columnar structure, their hardness reaches 44.57 GPa. Theudadhesion strength of coatings reaches 66.77 GPa, the friction coefficient of the «cover – Al2O3» is 1.1. It hasudbeen determined, that the hardness of the investigated coatings significantly depends on the pressure of theudreaction gas. The coatings are promising as protective coatings for friction pairs and cutting tools.