The deposition temperature and proton radiation influence on the structure and stress-strain state of Ti‑W‑C system ion-plasma coatings was studied by the methods of wide-angle X-ray diffractometry combined with tensometry. It is found out that during sputtering MeC targets (where Me is a solid solution in the lattice of Ti and W atoms) when the ratio Ti / W reduces the transition from the one-phase state from (Ti, W)C carbide to the two-phase state takes place where the second one is represented by the lower in carbon a‑W2C‑phase. Formation of lower phases correlates with depleting the composition by the interstitial element (C) while the content of W in the coating increases that has a relatively small heat of the carbide formation value. Essential changes under irradiation with protons of 200 keV to dose of 6.5×1017 cm-2 occur only in a stress-strain state.
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