Universal Trench Edge Termination Design

摘要

The minimum trench edge termination length for various trench depth is theoretically determined to obtain universal curve for efficient design under considering trade-off relation with trench fabrication difficulty, cost and limitation specially for thin wafer IGBTs and diodes. This study unveils for the first time clear relationship between trench depth and termination length. We present practical design for each trench depth based on design curve considering trench filler material.