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Reconstruction of GaAs/AlAs supperlattice multilayer structure by quantification of AES and SIMS sputter depth profiles

机译：通过量化AES和SIMS溅射深度剖面来重建GaAs / AlAs超晶格多层结构

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H.L. Kang; J.B. Lao; Z.P. Li; W.Q. Yao; C. Liu; J.Y. Wang;
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1. Reconstruction of GaAs/AlAs supperlattice multilayer structure by quantification of AES and SIMS sputter depth profiles [J] . Kang H. L., Lao J. B., Li Z. P., Applied Surface Science . 2016,第ptaA期

机译：通过量化AES和SIMS溅射深度剖面来重建GaAs / AlAs超晶格多层结构
2. Dependence of depth resolution on primary energy of low-energy Ar+ Ions (100-1000 eV) in AES sputter depth profiling of GaAs/AlAs superlattice [J] . Bungo T, Nagatomi T, Takai Y Surface and Interface Analysis: SIA: An International Journal Devoted to the Development and Application of Techniques for the Analysis of Surfaces, Interfaces and Thin Films . 2006,第12a13期

机译：GaAs / AlAs超晶格AES溅射深度分析中深度分辨率对低能Ar +离子（100-1000 eV）一次能的依赖性
3. Ultimate depth resolution and profile reconstruction in sputter profiling with AES and SIMS [J] . Hofmann S. Surface and Interface Analysis: SIA: An International Journal Devoted to the Development and Application of Techniques for the Analysis of Surfaces, Interfaces and Thin Films . 2000,第1期

机译：使用AES和SIMS在溅射轮廓分析中实现最终的深度分辨率和轮廓重建
4. Transport properties of AlAs/GaAs multilayer structures grown on (311)A GaAs substrates [C] . I.A.Panaev, V.Ya.Prinz, A.B.Vorobev, International symposium on compound semiconductors . 1997

机译：在（311）上生长的ALAS / GAAs多层结构的运输特性A GaAs基材
5. Simulation and modeling of the structure and surface profile of sputtered refractory films for VLSI barriers. [D] . Salahuddin, Mohammad. 1998

机译：用于VLSI阻挡层的溅射耐火膜的结构和表面轮廓的仿真和建模。
6. A comparative study of low energy radiation response of AlAs GaAs and GaAs/AlAs superlattice and the damage effects on their electronic structures [O] . M. Jiang, H. Y. Xiao, S. M. Peng, -1

机译：AlAsGaAs和GaAs / AlAs超晶格的低能辐射响应及其对电子结构的损伤作用的比较研究
7. Ultimate Depth Resolution and Profile Reconstruction in Sputter Profiling with AES and SIMS [O] . Hofmann, S. 2000

机译：溅射中的最终深度分辨率和轮廓重建使用aEs和sIms进行分析
8. Inelastic Tunneling in AlAs-GaAs-AlAs Heterostructures [R] . Mendez, E. E., Calleja, E., Wang, W. I. 1988

机译：alas-Gaas-alas异质结构中的非弹性隧道效应

Reconstruction of GaAs/AlAs supperlattice multilayer structure by quantification of AES and SIMS sputter depth profiles

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