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An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions

机译：氢氟酸溶液抑制多晶硅电偶腐蚀的有效方法

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Ministry of Science and Technology of China [2009CB320305, 2011CB933102]

机译：中国科学技术部[2009CB320305，2011CB933102]

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Liu YF; Xie J; Zhang ML; Yang JL; Yang FH;
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1. An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions [J] . Liu Y., Xie J., Zhang M., Microelectromechanical Systems, Journal of . 2011,第2期

机译：氢氟酸溶液抑制多晶硅电偶腐蚀的有效方法
2. An effective approach for restraining electrochemical corrosion of polycrystalline silicon caused by an HF-based solution and its application for mass production of MEMS devices [J] . Yunfei Liu, Jing Xie, Hui Zhao, Journal of Micromechanics and Microengineering . 2012,第3期

机译：抑制基于HF的溶液引起的多晶硅电化学腐蚀的有效方法及其在MEMS器件的批量生产中的应用
3. Effect of Galvanic Corrosion-Induced Roughness on Sidewall Adhesion in Polycrystalline Silicon Microelectromechanical Systems [J] . Macuk A.L., Timpe S.J. Microelectromechanical Systems, Journal of . 2013,第2期

机译：电化学腐蚀引起的粗糙度对多晶硅微机电系统中侧壁附着力的影响
4. A simple method for effectively restrain electrochemical corrosion of polycrystalline silicon by HF-based solutions [C] . Xie J., Liu Y.F., Zhang M.L., 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems . 2011

机译：一种通过HF基溶液有效抑制多晶硅电化学腐蚀的简单方法
5. High-temperature corrosion and wear of polycrystalline silicon nitride and single crystal silicon [D] . Park, Dong Soo 1990

机译：多晶硅氮化硅和单晶硅的高温腐蚀和磨损
6. A Galvanic Sensor for Monitoring the Corrosion Condition of the Concrete Reinforcing Steel: Relationship Between the Galvanic and the Corrosion Currents [O] . Elsa Vaz Pereira, Rita Bacelar Figueira, Maria Manuela Lemos Salta, 2009

机译：用于监测混凝土钢筋腐蚀状况的电流传感器：电流与腐蚀电流之间的关系
7. Mechanical effects of galvanic corrosion on structural polysilicon [O] . David C. Miller, William L. Hughes, Zhong-lin Wang, 2015

机译：电偶腐蚀对结构多晶硅的机械影响
8. Galvanic Corrosion in Silicon Microsystems: Finite Element Simulation Tool Development [R] . Stoldt, C. R. 2009

机译：硅微系统中的电偶腐蚀：有限元模拟工具开发

An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions

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