Comparison of Dry and Wet Oxidation Process during Low Pressure Boron Diffusion with BBR3 in Solar Cell Production

摘要

This paper deals with replacing a dry oxidation with a wet oxidation process during low pressure diffusion using boron tribromide (BBr3) in solar cell production. Because the liquid boron trioxide (B2O3), a product of a chemical reaction during diffusion, condenses apart from wafers on walls of quartz tube, it is essential to clean the tube after diffusion. This could be done by evaporation of water into the tube after unload or, in order to make the production time shorter, by replacing the dry oxidation with wet oxidation process. In this paper a comparison of the wet and dry oxidation is given with regard to the solar cell production.