On-chip temperature-compensated Love mode surface acoustic wave device for gravimetric sensing

摘要

This is the accepted manuscript. The following article appeared in Applied Physics Letters and may be found at http://scitation.aip.org/content/aip/journal/apl/105/21/10.1063/1.4902989. Copyright 2014 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.